20-nm-resolution soft x-ray microscopy demonstrated by use of multilayer test structures: erratum

✍ Scribed by Chao, Weilun; Anderson, Erik; Denbeaux, Gregory P.; Harteneck, Bruce; Liddle, J. Alexander; Olynick, Deirdre L.; Pearson, Angelic L.; Salmassi, Farhad; Song, ChengYu; Attwood, David T.

• Book ID: 115426365
• Publisher: Optical Society of America
• Year: 2003
• Tongue: English
• Weight: 31 KB
• Volume: 28
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.28.002530