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20-nm-resolution Soft x-ray microscopy demonstrated by use of multilayer test structures

✍ Scribed by Chao, Weilun; Anderson, Erik; Denbeaux, Gregory P.; Harteneck, Bruce; Liddle, J. Alexander; Olynick, Deirdre L.; Pearson, Angelic L.; Salmassi, Farhad; Song, Cheng Yu; Attwood, David T.

Book ID: 115426228
Publisher: Optical Society of America
Year: 2003
Tongue: English
Weight: 732 KB
Volume: 28
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.28.002019

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