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136. New methods for the investigation of processes in the plasma zone during pyrocarbon formation

โœ Scribed by H. Luhleich; P. Pflaum


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
136 KB
Volume
14
Category
Article
ISSN
0008-6223

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SEM linewidth measurement in the process latitude investigation procedure can be replaced with a resist reflow technique for PMMA and other positive resists. The linewidth dependence on technical parameters can be measured quickly and cheaply with specialised test structures.