1113. Comparison of some physical properties of resistance-heat and electron-gun evaporated SiO films

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 273 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)90447-8