Zr(IV) and Hf(IV) β-diketonate complexes as precursors for the photochemical deposition of ZrO2 and HfO2 thin films

✍ Scribed by G. Cabello; L. Lillo; G.E. Buono-Core

• Book ID: 116670777
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 698 KB
• Volume: 354
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2007.08.014