✦ LIBER ✦
Zone-plate-array lithography: A low-cost complement or competitor to scanning-electron-beam lithography
✍ Scribed by Henry I. Smith; Rajesh Menon; Amil Patel; David Chao; Michael Walsh; G. Barbastathis
- Book ID
- 108207631
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 394 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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