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Zn1-xCdxO Film Growth Using Remote Plasma-Enhanced Metalorganic Chemical Vapor Deposition

✍ Scribed by Shigemori, Satoshi; Nakamura, Atsushi; Ishihara, Junji; Aoki, Toru; Temmyo, Jiro

Book ID: 111925693
Publisher: Institute of Pure and Applied Physics
Year: 2004
Tongue: English
Weight: 88 KB
Volume: 43
Category: Article
ISSN: 0021-4922
DOI: 10.1143/jjap.43.l1088

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