Zero-compliance aerostatic bearing for an ultra-precision machine

✍ Scribed by H. Mizumoto; T. Matsubara; N. Hata; M. Usuki

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 937 KB
• Volume: 12
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(90)90030-3