XY stages driving an electron beam mastering system for high density optical recording

✍ Scribed by Sumio Hosaka; Tatsundo Suzuki; Masahiro Yamaoka; Keizo Katoh; Fumio Isshiki; Mitsuhide Miyamoto; Yasushi Miyauchi; Akira Arimoto; Tetsuya Nishida

• Book ID: 114155430
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 935 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00498-7