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XPS study of the ultrathin a-C:H films deposited onto ion beam nitrided AISI 316 steel

โœ Scribed by S. Meskinis; M. Andrulevicius; V. Kopustinskas; S. Tamulevicius

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
185 KB
Volume
249
Category
Article
ISSN
0169-4332

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The chemical composition and microstructure of dual ion beam-deposited รlms with nitrogen contents in the CN x range 20-33 at.% have been examined by Fourier transform infrared spectroscopy (FTIR) and x-ray photoelectron spectroscopy (XPS). The FTIR spectra together with other published data have be