✦ LIBER ✦
XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source
✍ Scribed by H. Yan; R.W.M. Kwok; S.P. Wong
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 332 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0169-4332
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