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XPS investigation of aluminum and silicon surfaces nitrided by a distributed electron cyclotron resonance nitrogen plasma

✍ Scribed by N Duez; B Mutel; C Vivien; L Gengembre; P Goudmand; O Dessaux; J Grimblot

Book ID: 117215582
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 303 KB
Volume: 482-485
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(01)00795-6

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