✦ LIBER ✦
XPS, ESR and resistivity measurements on amorphous silicon oxynitride films (a-SiOxNy) prepared by reactive evaporation of Si in presence of NO2
✍ Scribed by L. Kubler; R. Haug; F. Ringeisen; A. Jaegle
- Book ID
- 118332010
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 667 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0022-3093
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