XPS Study of Mn Thin Films Grown on GaAs
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Dong, G. S.; Xu, M.; Chen, Y.; Jin, X. F.; Wang, Xun
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Article
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1996
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John Wiley and Sons
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English
โ 423 KB
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The composition-depth profile studies using x-ray photoelectron spectroscopy (XPS) are carried out for Mn thin films grown on GaAs(001) substrates at different substrate temperatures. The experimental results show that due to the interdiffusion and chemical reaction, an Mn-Ga-As mixed layer is forme