𝔖 Bobbio Scriptorium
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XPS and AES studies of halofluorocarbon plasma etched surfaces

✍ Scribed by E. Occhiello; F. Garbassi


Book ID
104592152
Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
390 KB
Volume
12
Category
Article
ISSN
0142-2421

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Polystyrene and polyethyleneterephthalate (PET) coupons were exposed to r.f. plasmas containing helium, oxygen and nitrogen. The modified surfaces were characterized by x-ray photoelectron spectroscopy shortly following plasma treatment and after storage in air for about 360 days. The oxygen concent