✦ LIBER ✦
XPS and AES characterization of SiNx:H layers deposited by PECVD on Parylene C. Effects of thermal treatments on Parylene C surfaces and Parylene CSiNx:H interlayers
✍ Scribed by E. Bêche; R. Berjoan; J. Viard; B. Cros; J. Durand
- Book ID
- 103423720
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 806 KB
- Volume
- 258
- Category
- Article
- ISSN
- 0040-6090
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