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Xenon and argon irradiation of TiN films on Al-3wt.%Mg

✍ Scribed by W. Müller; W. Bolse; K.P. Lieb


Book ID
108025622
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
473 KB
Volume
139
Category
Article
ISSN
0921-5093

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Ion beam induced modifications of TiN an
✍ W. Müller; W. Bolse; K. P. Lieb; F. Shi; Th. Weber 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 932 KB

Thin titanium nitride films (50-110nm) deposited via magnetron sputtering on A1 ÷ 3wt.% Mg substrates were irradiated with Ar, Kr, and Xe ion beams at room temperature and with energies between 0.1.0.9MeV. Sputtering yields and interface mixing rates were determined using Rutherford backscattering (