✦ LIBER ✦
X-ray photoemission study of various polyimide cleaning processes before metal deposition
✍ Scribed by A. Ermolieff; S. Marthon; H. Granges; J. Piaguet; F. Pierre
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 329 KB
- Volume
- 239
- Category
- Article
- ISSN
- 0040-6090
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