✦ LIBER ✦
X-ray photoemission spectroscopy characterization of silicon surfaces after CF4/H2 magnetron ion etching : comparisons to reactive ion etching: Gottlieb S Oehrlein et al, J Vac Sci Technol, A6, 1988, 1989–1993
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 161 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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