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X-ray photoelectron spectroscopy study of the growth of dielectric films on various substrates

✍ Scribed by Y. Wang; S. Fisson; V. Nguyen Van; G. Vuye; K. Yu-Zhang; J. Rivory


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
611 KB
Volume
68-69
Category
Article
ISSN
0257-8972

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