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X-ray photoelectron spectroscopy study of the difference between reactively evaporated and direct sputter-deposited TiN films and their oxidation properties

✍ Scribed by Prieto, P.

Book ID: 126829875
Publisher: AVS (American Vacuum Society)
Year: 1995
Tongue: English
Weight: 463 KB
Volume: 13
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.579711

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