๐”– Bobbio Scriptorium
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X-ray photoelectron diffraction study of platinum particles deposited on rutile titanium dioxide

โœ Scribed by K. Tamura; U. Bardi; Y. Nihei

Book ID
104196716
Publisher
Elsevier Science
Year
1989
Weight
68 KB
Volume
216
Category
Article
ISSN
0167-2584

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## ลฝ . ลฝ . The chemical compositions of physical vapor-deposited PVD and chemical vapor-deposited CVD titanium nitride ลฝ . ลฝ . TiN thin films were investigated by X-ray photoelectron spectroscopy XPS . The effect of a H rN plasma treatment on 2 2 the chemical composition of CVD TiN thin film was a