X-ray photo-emission and Auger spectra of damage induced by Ar + -ion etching at SiO 2 surfaces

✍ Scribed by Paparazzo, E

• Book ID: 120534753
• Publisher: Institute of Physics
• Year: 1987
• Tongue: English
• Weight: 585 KB
• Volume: 20
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/20/8/022