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X-ray microlithography with a transition radiation source

✍ Scribed by P. Goedtkindt; J.-M. Salomé; X. Artru; P. Dhez; N. Maene; F. Poortmans; L. Wartski

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 295 KB
Volume: 13
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90104-l

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