X-ray microdiffraction imaging investiga
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LΓΌbbert, D. ;MikulΓk, Petr ;Pernot, Petra ;Helfen, Lukas ;Craven, Michael D. ;Ke
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Article
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2006
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John Wiley and Sons
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English
β 266 KB
## Abstract The crystalline quality in epitaxially laterally overgrown (ELO) GaN and the amount of wing tilt is characterized on a local basis, with high spatial and angular resolution. A method of fullβfield Xβray microdiffraction imaging, termed rocking curve imaging, is used to record simultaneo