✦ LIBER ✦

X-Ray Lithography for Integrated Circuit Development and Manufacturing

✍ Scribed by Zacharias, A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The center for X-ray lithography facilit

✍ G.M. Wells; E.L. Brodsky; M. Reilly; J.W. Taylor; F. Cerrina 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 386 KB

Percolation theory and resist developmen

✍ Heinrich K. Oertel; Manfred Weiss; Ralph Dammel; Jürgen Theis 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Beamlines for thin and thick resist X-ra

✍ Glen H. Dahlbacka; Jorge Pearce; Francis Younger 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 617 KB

X-ray and UV Adjustment of Threshold Vol

✍ M. N. Levin; V. R. Gitlin; A. V. Tatarintsev; S. S. Ostrouhov; S. G. Kadmensky 📂 Article 📅 2002 🏛 Springer 🌐 English ⚖ 89 KB

Determination of wavelength and excitati

✍ Sullivan, P.A.; McCoy, J.H. 📂 Article 📅 1976 🏛 IEEE 🌐 English ⚖ 820 KB

The development of a silicon nitride mas

✍ C.C.G. Visser; J.E. Uglow; D.W. Burns; G. Wells; R. Redaelli; F. Cerrina; H. Guc 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 415 KB