X-ray lithography at the super-ACO storage ring of Orsay(France)

✍ Scribed by F. Rousseaux; A.M. Haghiri-Gosnet; C. Khan Malek; B. Kebabi; H. Launois; J. Durand

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 322 KB
• Volume: 11
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(90)90103-z