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X-ray diffraction study of the multi component oxide systems.

✍ Scribed by V.E. Sokol'skii; V.P. Kazimirov; V.G. Kuzmenko


Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
168 KB
Volume
93
Category
Article
ISSN
0167-7322

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Study of oxide precipitates in silicon u
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## Abstract The results of a study of oxide precipitates in Czochralski (CZ) grown silicon using two X‐ray diffraction methods are reported. The diffuse scattering around the Bragg diffraction maxima was measured on a series of samples after various two‐stage annealing treatment. Combining the anal