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X-ray crystal orientation determination for semiconductor single crystals

✍ Scribed by Dr. U. Keppler; M. Meier; A. Neifeind; C. Rohmer


Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
313 KB
Volume
10
Category
Article
ISSN
0232-1300

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✦ Synopsis


Abstract

An improved method to measu reorientation angles of flat single crystals was developed taking Buerger precession technique. The method is described and compared with Laue‐ and goniometer techniques. Advantages are low costs and short measuring time. An easy evaluation of the records allows to take this method as a routine angle determination for semiconductor manufacturing.


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X-ray topography and crystal orientation
✍ A. Onyszko; W. Bogdanowicz; K. Kubiak; J. Sieniawski πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 327 KB

## Abstract A study of the crystal orientation and structural perfection of single crystal blades obtained by Bridgeman method from CMSX‐4 nickel superalloy at various withdrawal rates between 1 and 5 mm/min was carried out using the Laue diffraction method and X‐ray diffraction topography methods