✦ LIBER ✦
X-ray absorption spectroscopy of high-k gate dielectric insulating layers for next-generation semiconductor devices as measured by superconducting detectors
✍ Scribed by M. Ohkubo; P. Fons; A. Kushino; Y.E. Chen; M. Ukibe; Y. Kitajima
- Book ID
- 108219519
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 100 KB
- Volume
- 559
- Category
- Article
- ISSN
- 0168-9002
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