✦ LIBER ✦
WP-A3 Application of CW argon laser annealing on fabricating short-channel PolySilicon-gate MOSFET's
✍ Scribed by Peng, J.D.; Palkuti, L.J.; Teng, T.C.; Skinner, C.
- Book ID
- 114593638
- Publisher
- IEEE
- Year
- 1980
- Tongue
- English
- Weight
- 321 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0018-9383
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