Micro-stitching interferometry at the ES
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Amparo Rommeveaux; Raymond Barrett
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Article
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2010
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Elsevier Science
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English
β 530 KB
The ESRF metrology laboratory has recently acquired a new optical micro-interferometer optimised for micro-roughness measurement of X-ray mirrors. The fully integrated system offers a wide range of measurement capabilities adapted for both very rough surfaces and super smooth surfaces ( o 1 Γ rms).