Working principle and performance of the dynamic micropump

✍ Scribed by Torsten Gerlach; Helmut Wurmus

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 501 KB
• Volume: 50
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(96)80097-5

✦ Synopsis

This paper deals with a piezoelectrically driven micropump of the reciprocating type. For the flux rectification, so-called dynamic passive valves, particularly shaped micro channels having a direction-dependent fluid-dynamic behaviour, are used. This solution renders the pump structure extremely simple and makes the fabrication process cheap. Also, further miniaturization becomes possible. Typical working parameters are zero-load pump rates of several hundred microlittes per minute and pump pressures of up to (7 \mathrm{kPa}). The upper frequency limit is as high as about (10 \mathrm{kHz}). Thus, pumping of gases at resonance operation also becomes possible. A quasistatic model has been developed which enables an optimized application-oriented layout process to be carried out.