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Workfunction tuning of zinc oxide films by argon sputtering and oxygen plasma: an experimental and computational study

✍ Scribed by Kuo, Fang-Ling; Li, Yun; Solomon, Marvin; Du, Jincheng; Shepherd, Nigel D

Book ID: 120477435
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 597 KB
Volume: 45
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/45/6/065301

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