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Work Function Engineering Within a Single Metal Gate Stack: Manipulating Terbium- and Aluminum-Induced Interface Dipoles of Opposing Polarity

✍ Scribed by Lim, A.E.-J.; Dim-Lee Kwong; Yee-Chia Yeo


Book ID
114619313
Publisher
IEEE
Year
2009
Tongue
English
Weight
733 KB
Volume
56
Category
Article
ISSN
0018-9383

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