✦ LIBER ✦
Width determination of SiO2-films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness
✍ Scribed by Bernhard Schaffer; Werner Grogger; Ferdinand Hofer
- Book ID
- 108480890
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 502 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0968-4328
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