✦ LIBER ✦
Wide vacuum pressure range monitoring by pirani SAW sensor
✍ Scribed by Nicolay, P.; Elmazria, O.; Sarry, F.; Bouvot, L.; Kambara, H.; Singh, K.J.; Alnot, P.
- Book ID
- 119823796
- Publisher
- IEEE
- Year
- 2010
- Tongue
- English
- Weight
- 796 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0885-3010
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