✦ LIBER ✦
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
✍ Scribed by Fraga, M. A.; Furlan, H.; Pessoa, R. S.; Massi, M.
- Book ID
- 121581169
- Publisher
- Springer-Verlag
- Year
- 2013
- Tongue
- English
- Weight
- 528 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0946-7076
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