✦ LIBER ✦
What kinds of SOI wafers are suitable for what micromachining purposes?
✍ Scribed by Yozo Kanda
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 437 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0924-4247
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