Wet etching and chemical polishing of InAs/GaSb superlattice photodiodes

✍ Scribed by Chaghi, R; Cervera, C; Aït-Kaci, H; Grech, P; Rodriguez, J B; Christol, P

• Book ID: 123622226
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 799 KB
• Volume: 24
• Category: Article
• ISSN: 0268-1242
• DOI: 10.1088/0268-1242/24/6/065010