Wet-chemistry surface treatment for dark-current reduction that preserves lateral dimensions of reactive ion etched Ga/sub 0.47/In/sub 0.53/As p-i-n diode photodetectors

✍ Scribed by Porkolab, G.A.; Chen, Y.J.; Merritt, S.A.; Tabatabaei, S.A.; Agarwala, S.; Johnson, F.G.; King, O.; Dagenais, M.; Wilson, R.A.; Stone, D.R.

• Book ID: 119785977
• Publisher: IEEE
• Year: 1997
• Tongue: English
• Weight: 80 KB
• Volume: 9
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/68.559398