Wet chemical etching method for BST thin films annealed at high temperature

✍ Scribed by R.T. Zhang; C.R. Yang; A. Yu; B. Wang; H.J. Tang; H.W. Chen; J.H. Zhang

• Book ID: 108060634
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 643 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.233