Wet and dry etching experience for sensor micromachining: B. Puers, E. Peeters, W. Sansen, Microelectronic Engineering, 13(1–4), pp. 443–446. (Mar 1991)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 124 KB
• Volume: 14
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(92)90214-h