Waveguide Raman microspectroscopy used for local investigation of very thin films

✍ Scribed by J. Mugnier; C. Urlacher; J. C. Plenet; B. Champagnon

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 320 KB
• Volume: 28
• Category: Article
• ISSN: 0377-0486
• DOI: 10.1002/(sici)1097-4555(199712)28:12<989::aid-jrs193>3.0.co;2-u

✦ Synopsis

This paper presents a new Raman tool for local investigations of very thin waveguiding Ðlms. This method, called waveguide Raman microspectroscopy (WRMS), combines the advantages of micro-Raman spectroscopy (MRS) and waveguide Raman spectroscopy (WRS). Experiments were carried out on a thin waveguide (150 nm TiO 2 thick) obtained by the sol-gel process. Results obtained on the thin waveguide conÐrm the interest in this TiO 2 non-destructive method, including simultaneous optical observations of the layer, local investigations, microstructural analyses and very low-wavenumber Raman scattering investigations. Further applications of WRMS are described.