Water Vapor Uptake in Photolithographic Polymers Observed by Infrared Near-Field Scanning Optical Microscopy in a Controlled Environment

✍ Scribed by McDonough, Laurie A.; Dragnea, Bogdan; Preusser, Jan; Leone, Stephen R.; Hinsberg, William D.

• Book ID: 126201735
• Publisher: American Chemical Society
• Year: 2003
• Tongue: English
• Weight: 176 KB
• Volume: 107
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp022489j