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Wafer-to-wafer process fault detection using data stream mining techniques

✍ Scribed by Jong Myoung Ko, Seong Rok Hong, Ja Young Choi, Chang Ouk Kim


Book ID
118829036
Publisher
Korean Society for Precision Engineering
Year
2012
Tongue
English
Weight
775 KB
Volume
14
Category
Article
ISSN
1229-8557

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## Abstract A new strategy using a hybrid linear ion trap/Orbitrap mass spectrometer and multiple post‐acquisition data mining techniques was evaluated and applied to the detection and characterization of __in vitro__ metabolites of indinavir. Accurate‐mass, full‐scan MS and MS/MS data sets were ac