Wafer temperature measurement in a rapid thermal processor with modulated lamp power

✍ Scribed by B. Nguyenphu; A. T. Fiory

• Book ID: 107457930
• Publisher: Springer US
• Year: 1999
• Tongue: English
• Weight: 268 KB
• Volume: 28
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-999-0125-8