Wafer Surface Charging Model for Single-Wafer Wet-Spin Processes

✍ Scribed by Mui, D.S.L.; Lenz, E.H.; Cyterski, C.; Venkataraman, K.; Kawaguchi, M.

• Book ID: 114669516
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 459 KB
• Volume: 24
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/tsm.2011.2162346