✦ LIBER ✦
Wafer scale submicron optical grating for the picometre measurement of aberrations and stitching errors in step and repeat cameras
✍ Scribed by Y. Jourlin; J. Jay; F. Pigeon; G. Bouchet; O. Parriaux; P. van Dijk; R. Pellens; S. Topçu; Y. Alayli; M. Bonis
- Book ID
- 114155406
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 980 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.