Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking

✍ Scribed by Uddin, A.; Milaninia, K.; Chin-Hsuan Chen; Theogarajan, L.

• Book ID: 119815867
• Publisher: Institute of Electrical and Electronics Engineers
• Year: 2011
• Tongue: English
• Weight: 916 KB
• Volume: 1
• Category: Article
• ISSN: 2156-3950
• DOI: 10.1109/tcpmt.2011.2166395